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Non-contact air bearing 360° continuous high-speed direct drive EG-ZAR Series a high-performance air-bearing direct-drive rotary table ，
Performance Characteristics
⚫ Non-contact air bearing, 360° continuous high-speed direct-drive rotary table
⚫ Direct-drive control by rotary motor
⚫ Angular accuracy ±2 arc sec, repeatability ±1 arc sec
⚫ Axial and radial runout less than 300nm
⚫ High-precision circular grating position feedback
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Autofocus function Triaxial spiral scanning system EG-DL240-400-Z5-T
Performance Features
⚫ 3-axis helical scanning system, capable of Archimedes constant velocity helical scanning, supporting autofocus, Part-Speed PSO equal-interval trigger camera capture function for constant velocity helical synthesized trajectories.
⚫ High-speed air bearing, low runout.
⚫ T-axis with a 12-inch 4kg chuck disk and built-in air slip ring, supporting up to 6000rpm. Therefore, when the trajectory radius is reduced from 150mm to 10mm, the platform’s synthesized linear velocity can still remain constant at 2000mm/s.
⚫ X-axis and Z-axis are driven by linear motors, equipped with high-precision crossed roller guides, and the Z-axis uses cylinder counterweight; the T-axis is directly driven by a rotary motor.
⚫ X-axis flatness and straightness ±2μm, Z-axis straightness ±2μm.
⚫ X-axis and Z-axis absolute positioning accuracy ±200nm; T-axis resolution 0.1 arc. Repeatability: ±0.5 arc sec; Positioning accuracy: ±1 arc sec
Strong load-bearing capacity: Maximum axial load on the T-axis is 10 kg, and the maximum radial load is 2 kg.
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E-ABL250-X One-dimensional Ultra-precision air bearing platform
● Ideal for scanning applications or high-precision positioning
● Cleanroom compatible
● Size of the motion platform 250 mm × 90 mm
● Travel ranges to 100mm to 600 mm
● Load capacity to 200 N
● Air-Bearing Design
● the E-EC-ABL-X
● features a smaller cross-section than typical air-bearing stages without sacrificing load capability. The large air-bearing surfaces provide excellent stiffness, allowing for heavy loading. Proprietary manufacturing
● techniques result in a stage with unsurpassed pitch, roll and yaw characteristics.
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E-MCPA-XY （Small linear motor coplanar air bearing Stage
Magnetic preloaded air guide
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E-CPA-XY （coplanar air bearing XY Stage）
The X-axis beam is made of alumina ceramics. Compared with marble beams, ceramic beams have better accuracy, stability and wear resistance.
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EABRX-M 200 Air Bearing rotation stage
Surface metrology, including the measurement of roundness, flatness, and form error•Micro- and nanotomography•Beamline and synchrotron research•Precision manufacturing, including diamond turning, grinding and other high-performance machine toolapplications•Optical alignment, inspection and calibration systems•Engineered for Precision•The EABRX series is meticulously engineered to consistently satisfy even the most stringent performancerequirements. At its core is an industry-leading, air-bearing technology that delivers nanometer-level errormotion performance with high stiffness and load-carrying capabilities. -
EC-ABL140-X series (economical magnetic preload series) Ultra-thin one-dimensional air flotation motion stage
● Travel ranges to 100mm to 400 mm
● Load capacity 10 kg
● Air-Bearing Design
● features a smaller cross-section than typical air-bearing stages without sacrificing load capability. The large air-bearing surfaces provide excellent stiffness, allowing for heavy loading. Proprietary manufacturing
● techniques result in a stage with unsurpassed pitch, roll and yaw characteristics.
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EC-ABL260-X Series (economical magnetic preload series）
● Travel ranges to 200mm to 600 mm
● Load capacity 25 kg
● Air-Bearing Design
● features a smaller cross-section than typical air-bearing stages without sacrificing load capability. The large air-bearing surfaces provide excellent stiffness, allowing for heavy loading. Proprietary manufacturing
● techniques result in a stage with unsurpassed pitch, roll and yaw characteristics.
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E-ABW400-X One-dimensional air floating platform
● Ideal for scanning applications or high-precision positioning
● Cleanroom compatible
● Size of the motion platform 400 mm × 138 mm
● Travel ranges 200 mm to 1000 mm
● Resolution to 5 nm
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EABRX-M150 Air Bearing rotation stage
Surface metrology, including the measurement of roundness, flatness, and form error•Micro- and nanotomography•Beamline and synchrotron research•Precision manufacturing, including diamond turning, grinding and other high-performance machine toolapplications•Optical alignment, inspection and calibration systems•Engineered for Precision•The EABRX series is meticulously engineered to consistently satisfy even the most stringent performancerequirements. At its core is an industry-leading, air-bearing technology that delivers nanometer-level errormotion performance with high stiffness and load-carrying capabilities. -
E-ABR80 Unpowered air bearing rotary stage
Design Features•Delivers best-in-class rotational motion, helping you to optimize your high-precisionprocess•Minimizes axial-, radial-, and tilt-error motions, reducing the need for extensive post-processing of parts and measurement data•Provides generous load-carrying capacity without compromising on motion quality•Integrates easily into precision systems and machines due to compact, lightweightform factor, as well as horizontal and vertical mounting and load-carrying capabilities -
E-ABR100 Unpowered air bearing rotary stage
● Cleanroom compatible
● Motion platform diameter from 100 mm to 300 mm
● Eccentricity and flatness < 100 nm
● Can be mounted vertically or horizontally
● Design Features
● Delivers best-in-class rotational motion, helping you to optimize your high-precision process
● Minimizes axial-, radial-, and tilt-error motions, reducing the need for extensive post-processing of parts and measurement data
